TU Chemnitz

Chemnitz University of Technology (TUC) is a research-intensive and international university in Saxony. It combines engineering excellence and natural sciences with computer science, economics, and the humanities and social sciences. Its focus areas include, among others, smart materials, human-technology interaction, and sustainable production. Modern laboratories and transfer centers link research with regional and global industry. The Center for Micro and Nano Technologies is one of the world’s leading research centers with the aim of developing new technologies in the domain of micro and nano systems.

Within the HyPACT project TUC is responsible for the complex manufacturing of the demonstrators, leading Task 4.1 on Integration Processes for Bonding Multiple Chiplets on the Wafer. Surface processing, Patterning, Wet and dry etching of various materials are necessary to create suitable surfaces for Hybrid Bonding. The actual process step of Hybrid Bonding is also carried out at the Center for Micro and Nano Technologies.

More information: www.tu-chemnitz.de